Rubloff G W Ed. <br/><br/>
Deposition and growth: limits for microelectronics 

 - New York       AIP          1988 
 - 388p.  cm. 
 - American Vacuum Society Series; 4 .
<br/><br/><label>Standard No.: </label>49973 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors
<br/><br/><label>Dewey Class. No.: </label>C6:212, M8