TY  - BOOK
AU  - Rubloff G W Ed.
ED  - American Institute of Physics Conference Proceedings
TI  - Deposition and growth: limits for microelectronics
T2  - American Vacuum Society Series; 4
U1  - C6:212, M8 
PY  - 1988///
CY  - New York    
PB  -  AIP        
KW  - Semiconductors
ER  -