TY  - BOOK
AU  - Liu Ai-Qun
TI  - Photonic MEMS devices :  Design, fabrication and control.     
T2  - Optical science and engineering
U1  - D65,5:4, P9 
PY  - 2009///
CY  - Boca Raton
PB  -  CRC Press     
ER  -