Madou Marc J <br/><br/>
Fundamentals of microfabrication and nanotechnology.3V. 

 - 3 
 - Boca Raton   CRC Press       2012 
 - V1-xiv,641p; V2-xiv,656p; V3-xiv,636p  cm. 
<br/><br/><label>ISBN: </label> 13100.01 
<br/><br/><label>Standard No.: </label>114611 
<br/><br/><label>Source: </label> 184, 06/01/2012, Classic Book Service  Textual 
<br/><br/><label>Dewey Class. No.: </label>G9X1, Q2.1-.3