TY  - BOOK
AU  - Zhang Wendong
AU  -  Chou Xiujian
AU  -  Ma Zongmin
AU  -  Shi Tielin
TI  - Measurement technology for micro-nanometer devices
U1  - D65,8, Q7 
PY  - 2017///
CY  - Singapore
PB  - Wiley          
KW  - Electronic Science
ER  -