Campbell, Stephen A. <br/><br/>
Science and engineering of microelectronic fabrication 

 - 2nd 
 - New York :   Oxford University Press,         2012. 
 - xiv,603p. 
<br/><br/><label>ISBN: </label>9780198084808 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic Science