Ghandhi, Sorab K. <br/><br/>
VLSI fabrication principles :   silicon and gallium arsenide / 

 - 2nd 
 - New York :  John Wiley & Sons,  2003. 
 - xxiv,834p.  cm. 
<br/><br/><label>ISBN: </label>9814126942 
<br/><br/><label>Standard No.: </label>111260 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Dewey Class. No.: </label>D651  P3