Jackson Kenneth A Ed. Handbook of semiconductor technology - Weinheim Wiley-VCH 2000 - p. cm. Includes bibliographical references ISBN: 3527298355 (hbd) Standard No.: 7288 Source: Ashutosh, Textual Subjects--Topical Terms: Electricity Semiconductor processingPhysics Dewey Class. No.: C6:212:(F)g, P0.2 RR