APA

Syed Rizvi; Robert Doering; Vallabh H. Dhudshia; Ya-Ping Sun; Leonard W. Foster; Robert Baumann; Samuel C. Wood; Bruno W. Schueler; Robert H. Havemann; Dieter K. Schroder; Peter L.G. Ventzek; Shahid Rauf; Terry G. Sparks; Cesar M. Garza; Paul J. Timans; Mohammed J. Meziani; Pankaj Pathak; Jonathan D. Reid; Wen Lin; C. Rinn Cleavelin; Sylvia Pas; Lawrence C. Wagner; Louis H. Breaux; Shi-Li Zhang; Li-Qun Xia; Mei Chang; G. Dan Hutcheson; Ting Yiu Tsui; Michael Lamson; George K. Celler; Gene E. Fuller; Greg S. Strossman; Joe McPherson; Ennis T. Ogawa; Christian Lavoie; Erdogan Madenci; Yoshio Nishi; Gabriel G. Barna; John R. Hauser; Hiroaki Niimi; Andrew J. McKerrow; Thomas E. Seidel; Girish A. Dixit; Sean M. Collins; Alain C. Diebold, .Handbook of Semiconductor Manufacturing Technology. : Taylor and Francis.

Chicago

Syed Rizvi; Robert Doering; Vallabh H. Dhudshia; Ya-Ping Sun; Leonard W. Foster; Robert Baumann; Samuel C. Wood; Bruno W. Schueler; Robert H. Havemann; Dieter K. Schroder; Peter L.G. Ventzek; Shahid Rauf; Terry G. Sparks; Cesar M. Garza; Paul J. Timans; Mohammed J. Meziani; Pankaj Pathak; Jonathan D. Reid; Wen Lin; C. Rinn Cleavelin; Sylvia Pas; Lawrence C. Wagner; Louis H. Breaux; Shi-Li Zhang; Li-Qun Xia; Mei Chang; G. Dan Hutcheson; Ting Yiu Tsui; Michael Lamson; George K. Celler; Gene E. Fuller; Greg S. Strossman; Joe McPherson; Ennis T. Ogawa; Christian Lavoie; Erdogan Madenci; Yoshio Nishi; Gabriel G. Barna; John R. Hauser; Hiroaki Niimi; Andrew J. McKerrow; Thomas E. Seidel; Girish A. Dixit; Sean M. Collins; Alain C. Diebold, .Handbook of Semiconductor Manufacturing Technology. : Taylor and Francis.

Harvard

Syed Rizvi; Robert Doering; Vallabh H. Dhudshia; Ya-Ping Sun; Leonard W. Foster; Robert Baumann; Samuel C. Wood; Bruno W. Schueler; Robert H. Havemann; Dieter K. Schroder; Peter L.G. Ventzek; Shahid Rauf; Terry G. Sparks; Cesar M. Garza; Paul J. Timans; Mohammed J. Meziani; Pankaj Pathak; Jonathan D. Reid; Wen Lin; C. Rinn Cleavelin; Sylvia Pas; Lawrence C. Wagner; Louis H. Breaux; Shi-Li Zhang; Li-Qun Xia; Mei Chang; G. Dan Hutcheson; Ting Yiu Tsui; Michael Lamson; George K. Celler; Gene E. Fuller; Greg S. Strossman; Joe McPherson; Ennis T. Ogawa; Christian Lavoie; Erdogan Madenci; Yoshio Nishi; Gabriel G. Barna; John R. Hauser; Hiroaki Niimi; Andrew J. McKerrow; Thomas E. Seidel; Girish A. Dixit; Sean M. Collins; Alain C. Diebold, .Handbook of Semiconductor Manufacturing Technology. : Taylor and Francis.

MLA

Syed Rizvi; Robert Doering; Vallabh H. Dhudshia; Ya-Ping Sun; Leonard W. Foster; Robert Baumann; Samuel C. Wood; Bruno W. Schueler; Robert H. Havemann; Dieter K. Schroder; Peter L.G. Ventzek; Shahid Rauf; Terry G. Sparks; Cesar M. Garza; Paul J. Timans; Mohammed J. Meziani; Pankaj Pathak; Jonathan D. Reid; Wen Lin; C. Rinn Cleavelin; Sylvia Pas; Lawrence C. Wagner; Louis H. Breaux; Shi-Li Zhang; Li-Qun Xia; Mei Chang; G. Dan Hutcheson; Ting Yiu Tsui; Michael Lamson; George K. Celler; Gene E. Fuller; Greg S. Strossman; Joe McPherson; Ennis T. Ogawa; Christian Lavoie; Erdogan Madenci; Yoshio Nishi; Gabriel G. Barna; John R. Hauser; Hiroaki Niimi; Andrew J. McKerrow; Thomas E. Seidel; Girish A. Dixit; Sean M. Collins; Alain C. Diebold, .: Taylor and Francis. .