Electroceramic- based mems: fabrication-technology and applications
Material type:
TextLanguage: English Series: Electronic materials: science and technologyPublication details: New York Springer 2005Description: xii,414p. cmISBN: - 0387233105 (hbd)
- D65,3, P5 Carpa
Textbook
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Textbook
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Department of Physics and Astrophysics Library | Department of Physics and Astrophysics Library | D65,3 P5 Carpa (Browse shelf(Opens below)) | Available | PA0005814 |
Includes bibliographical references; Index 411-414p
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