000 01120nam a2200337Ia 4500
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007 ta
008 221006b |||||||| |||| 00| 0 eng d
020 _a9783540766629 (hbd)
024 _a95708
037 _b224, 03/02/2010, Aviva Books Company
_cTextbook
040 _aPAPL
_cPAPL
_beng
041 _2eng
_aeng
082 _aC211, P8 Carpa
100 _aDepla D Ed.
_9714381
245 0 _aReactive sputter deposition
_b Mahieu S Ed.
260 _aBerlin
_bSpringer
_c2008
300 _axviii, 570p.
_ccm.
490 _aSpringer series in materials science, 109
500 _aIncludes bibliographical references.; Index 561-570p.
650 _a Chemical engineering
_9560885
650 _a Condensed matter physics
_9714382
650 _a Industrial chemsitry
_9714383
650 _a Organic Chemistry
650 _aPhysics
700 _a Mahieu S Ed.
_9714384
942 _hC211, P8 Carpa
_cTB
_2CC
999 _c1210371
_d1210371