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_a0750309768 (hbd) _cRs.6905.54 |
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| 024 | _a77677 | ||
| 037 |
_b318, 08/03/2007, Ashutosh Technical Books _cTextbook |
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| 040 |
_aPAPL _cPAPL _beng |
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| 041 |
_2eng _aeng |
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| 082 | _aC9B580aD65, P6 Carpa | ||
| 100 |
_aMakabe Toshiaki _9717499 |
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| 245 | 0 |
_aPlasma electronics:applications in microelectronic device fabrication _b Petrovic Zorman |
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| 260 |
_aNew _bYork Taylor & Francis _c2006 |
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| 300 |
_a339p. _ccm. |
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| 490 | _aSeries in plasma physics | ||
| 500 | _aIncludes bibliographical references; Index 331-339p | ||
| 650 |
_a Plasma engineering _9717500 |
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| 650 | _aPhysics | ||
| 700 |
_a Petrovic Zorman _9717501 |
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| 942 |
_hC9B580aD65, P6 Carpa _cTB _2CC |
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| 999 |
_c1212199 _d1212199 |
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