| 000 | 00996nam a2200289Ia 4500 | ||
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| 003 | OSt | ||
| 005 | 20221007123624.0 | ||
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| 007 | ta | ||
| 008 | 221006b |||||||| |||| 00| 0 eng d | ||
| 020 |
_a0387233105 (hbd) _cRs.6493.65 |
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| 024 | _a77743 | ||
| 037 |
_b313, 08/03/2007, Ashutosh Technical Books _cTextbook |
||
| 040 |
_aPAPL _cPAPL _beng |
||
| 041 |
_2eng _aeng |
||
| 082 | _aD65,3, P5 Carpa | ||
| 100 |
_aSetter Nava Ed. _9717509 |
||
| 245 | 0 | _aElectroceramic- based mems: fabrication-technology and applications | |
| 260 |
_aNew _bYork Springer _c2005 |
||
| 300 |
_axii,414p. _ccm. |
||
| 490 | _aElectronic materials: science and technology | ||
| 500 | _aIncludes bibliographical references; Index 411-414p | ||
| 650 |
_a Microelectromechanical systems _9717510 |
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| 650 | _aPhysics | ||
| 942 |
_hD65,3, P5 Carpa _cTB _2CC |
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| 999 |
_c1212203 _d1212203 |
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