| 000 | 00632nam a2200217Ia 4500 | ||
|---|---|---|---|
| 005 | 20241129120110.0 | ||
| 008 | 241129s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9783658410407 | ||
| 037 | _aTB | ||
| 040 |
_aSDCL _beng _cSDCL |
||
| 041 |
_aeng _2eng |
||
| 084 |
_aD6544, R3 _qSDCL |
||
| 100 |
_aHilleringmann Ulrich _9729131 |
||
| 245 | 0 | _aSilicon semiconductor technology: Processing and integration of microelectronic devices | |
| 260 |
_aWiesbaden _bSpringer _c2023 |
||
| 300 | _axi,264p. | ||
| 365 |
_aEUR _b64.99 |
||
| 650 | _aElectronic Science | ||
| 942 |
_cTB _hD6544, R3 |
||
| 999 |
_c1233332 _d1233332 |
||