000			01303nam a2200301Ia 4500
003			OSt
005			20250903142303.0
008			220909b |||||||| |||| 00| 0 eng d
020			_a9788126516810
037			_cTextual
040			_aCSL _beng _cCSL
041			_aeng
084			_aC6:24 M5;P2;20 _qCSL
100			_aSze, S. M. _eauthor _9813114
245		0	_aSemiconductor devices _b: Physics and technology
250			_a2nd ed.
260			_aNew Delhi: _b Wiley India, _c2002
300			_aviii, 564p.
500			_aAppendices A-L 531-550p.; Index 551-564p.
520			_aThis book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices
650			_a Devices _9819965
650			_a Physics _9819966
650			_a Semiconductor Devices _9819967
650			_aGeneral Science _9391529
942			_hC6:24 M5;P2;20 _cTEXL _2CC _n0
999			_c13073 _d13073