000			01460nam a22002537a 4500
005			20250619161413.0
008			250619b |||||||| |||| 00| 0 eng d
020			_a9783110620627
040			_aCSL _cCSL
041			_2eng _aeng
084			_aC21:(D) Q3 _qCSL
100			_aSharma, Swati
110			_eauthor.
245			_aCarbon for Micro and Nano Devices
260			_aBerlin : _bWalter De Gruyter, _c2024.
300			_ax, 243p. _b: col.ill. _c; 24cm.
500			_aIncluded bibliography and index
520			_aMicro and nano devices are an integral part of modern technology. To address the requirements of the state-of-the-art technology, topics are selected from both chip-based and flexible electronics. A wide range of carbon materials including graphene, carbon nanotube, glass-like carbon, porous carbon, carbon black, graphite, carbon nanofiber, laser-patterned carbon and heteroatom containing carbon are covered. This goal is to elucidate fundamental carbon material science along with compatible micro- and nanofabrication techniques. Real-life example of sensors, energy storage and generation devices, MEMS, NEMS and implantable bioelectronics enable visualization of the outcome of described processes.
650			_aCarbon electronics _9813461
650			_aCarbon nanostructures _9813462
650			_aMicrodevices _9813463
650			_aLaser patterning _9813464
942			_2CC _cTEXL _hC21:(D) Q3 _n0
999			_c1431903 _d1431903