000 00678nam a2200253Ia 4500
005 20260121114118.0
008 008 260114s9999 xx 000 0 eng d
020 _a9781119818984
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aPierre-Richard Dahoo
_9971012
245 0 _aApplications and Metrology at Nanometer-Scale 2 - Measurement Systems, Quantum Engineering and RBDO Method
260 _bWiley
260 _c2021
856 _uhttps://onlinelibrary.wiley.com/doi/book/10.1002/9781119818984
942 _cEBOOK
999 _c1550267
_d1550267