| 000 | 00688nam a2200265Ia 4500 | ||
|---|---|---|---|
| 005 | 20260121161432.0 | ||
| 008 | 008 260114s9999 xx 000 0 eng d | ||
| 020 | _a9781315274164 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aFundamentals of Microfabrication and Nanotechnology, Three-Volume Set _91044753 |
||
| 245 | 0 | _aMarc J. Madou | |
| 260 | _bTaylor and Francis | ||
| 260 | _c2011 | ||
| 650 |
_aNanoscience & Nanotechnology _91044754 |
||
| 856 | _uhttp://www.taylorfrancis.com/books/9781315274164 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1610784 _d1610784 |
||