| 000 | 00616nam a2200265Ia 4500 | ||
|---|---|---|---|
| 005 | 20260121165718.0 | ||
| 008 | 008 260114s9999 xx 000 0 eng d | ||
| 020 | _a9783319454146 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aTuncay Ozel _91055101 |
||
| 245 | 0 | _aCoaxial Lithography | |
| 260 | _bSpringer | ||
| 260 | _bSpringer | ||
| 260 | _c2016 | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-319-45414-6 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1620828 _d1620828 |
||