| 000 | 00686nam a2200265Ia 4500 | ||
|---|---|---|---|
| 005 | 20260121170427.0 | ||
| 008 | 008 260114s9999 xx 000 0 eng d | ||
| 020 | _a9783319762944 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aSeongbo Shim, Youngsoo Shin _91063759 |
||
| 245 | 0 | _aPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography | |
| 260 | _bSpringer | ||
| 260 | _bSpringer | ||
| 260 | _c2018 | ||
| 856 | _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-319-76294-4 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1629488 _d1629488 |
||