000 00666nam a2200265Ia 4500
005 20260121170653.0
008 008 260114s9999 xx 000 0 eng d
020 _a9783319918969
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aStephen M. Goodnick, Anatoli Korkin, Robert Nemanich
_91066735
245 0 _aSemiconductor Nanotechnology
260 _bSpringer
260 _bSpringer
260 _c2018
856 _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-319-91896-9
942 _cEBOOK
999 _c1632465
_d1632465