000 00633nam a2200265Ia 4500
005 20260121171901.0
008 008 260114s9999 xx 000 0 eng d
020 _a9783030183387
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aBoris Murmann, Bernd Hoefflinger
_91081626
245 0 _aNANO-CHIPS 2030
260 _bSpringer
260 _bSpringer
260 _c2020
856 _uhttps://link.springer.com/openurl?genre=book&isbn=978-3-030-18338-7
942 _cEBOOK
999 _c1647359
_d1647359