| 000 | 00572nam a2200241Ia 4500 | ||
|---|---|---|---|
| 005 | 20260306150641.0 | ||
| 008 | 008 260114s9999 xx 000 0 eng d | ||
| 020 | _a9783110712537 | ||
| 037 | _aEbook | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 245 | 0 | _aChemistry of Atomic Layer Deposition | |
| 260 | _bDe Gruyter | ||
| 260 | _c2022 | ||
| 650 |
_aMaterials Sciences _91124033 |
||
| 856 | _uhttps://www.degruyter.com/isbn/9783110712537 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1698471 _d1698471 |
||