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037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aGrill
_91133995
245 0 _aCold Plasma Materials Fabrication: From Fundamentals to Applications
260 _bIEEE
260 _c1994
856 _uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=5271223
942 _cEBOOK
999 _c1718197
_d1718197