| 000 | 00555nam a2200241Ia 4500 | ||
|---|---|---|---|
| 005 | 20260320201124.0 | ||
| 008 | 008 262003s9999 xx 000 0 eng d | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 | _aLee | ||
| 245 | 0 | _aPrinciples of Microelectromechanical Systems | |
| 260 | _bIEEE | ||
| 260 | _c2011 | ||
| 856 | _uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=5628438 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1719030 _d1719030 |
||