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040 _beng
040 _cCRL
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041 _aeng
084 _qCRL
100 _aHawkeye
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245 0 _aGlancing Angle Deposition of Thin Films: Engineering the Nanoscale
260 _bIEEE
856 _uhttps://ieeexplore.ieee.org/servlet/opac?bknumber=10513455
942 _cEBOOK
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