| 000 | 00709nam a2200289Ia 4500 | ||
|---|---|---|---|
| 005 | 20260324121250.0 | ||
| 008 | 008 260324s9999 xx 000 0 eng d | ||
| 020 | _a9780429194467 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aToshiaki Makabe; Zoran Lj. Petrovic _91161842 |
||
| 245 | 0 | _aPlasma Electronics | |
| 245 | 0 | _bApplications in Microelectronic Device Fabrication | |
| 260 | _bTaylor and Francis | ||
| 260 | _c2014 | ||
| 365 | _a | ||
| 365 | _b435 | ||
| 856 | _uhttp://www.taylorfrancis.com/books/9780429194467 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1753841 _d1753841 |
||