| 000 | 01380nam a2200277Ia 4500 | ||
|---|---|---|---|
| 005 | 20260324125945.0 | ||
| 008 | 008 260324s9999 xx 000 0 eng d | ||
| 020 | _a9781315213934 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aSyed Rizvi; Robert Doering; Vallabh H. Dhudshia; Ya-Ping Sun; Leonard W. Foster; Robert Baumann; Samuel C. Wood; Bruno W. Schueler; Robert H. Havemann; Dieter K. Schroder; Peter L.G. Ventzek; Shahid Rauf; Terry G. Sparks; Cesar M. Garza; Paul J. Timans; Mohammed J. Meziani; Pankaj Pathak; Jonathan D. Reid; Wen Lin; C. Rinn Cleavelin; Sylvia Pas; Lawrence C. Wagner; Louis H. Breaux; Shi-Li Zhang; Li-Qun Xia; Mei Chang; G. Dan Hutcheson; Ting Yiu Tsui; Michael Lamson; George K. Celler; Gene E. Fuller; Greg S. Strossman; Joe McPherson; Ennis T. Ogawa; Christian Lavoie; Erdogan Madenci; Yoshio Nishi; Gabriel G. Barna; John R. Hauser; Hiroaki Niimi; Andrew J. McKerrow; Thomas E. Seidel; Girish A. Dixit; Sean M. Collins; Alain C. Diebold _91179981 |
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| 245 | 0 | _aHandbook of Semiconductor Manufacturing Technology | |
| 260 | _bTaylor and Francis | ||
| 260 | _c2008 | ||
| 365 | _a | ||
| 365 | _b465 | ||
| 856 | _uhttp://www.taylorfrancis.com/books/9781315213934 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1775675 _d1775675 |
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