| 000 | 00967nam a2200277Ia 4500 | ||
|---|---|---|---|
| 005 | 20260324132030.0 | ||
| 008 | 008 260324s9999 xx 000 0 eng d | ||
| 020 | _a9781315221076 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aTatsuhiro Yabune; Takashi Imaoka; Hiroto Izumi; Akinobu Teramoto; Masafumi Kitano; Hiroshi Sugawara; Masaaki Nagase; Nobukazu Ikeda; Koji Nishino; Masayuki Miyashita; Hirohisa Kikuyama; Jun Takano; Hiroshi Morita; Ikunori Yokoi; Nobuhiko Inoue; Senri Ojima; Kenichi Mitsumori; Tadahiro Ohmi; Hitoshi Morinaga _91187772 |
||
| 245 | 0 | _aScientific Wet Process Technology for Innovative LSI/FPD Manufacturing | |
| 260 | _bTaylor and Francis | ||
| 260 | _c2005 | ||
| 365 | _a | ||
| 365 | _b465 | ||
| 856 | _uhttp://www.taylorfrancis.com/books/9781315221076 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1785458 _d1785458 |
||