000 00967nam a2200277Ia 4500
005 20260324132030.0
008 008 260324s9999 xx 000 0 eng d
020 _a9781315221076
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aTatsuhiro Yabune; Takashi Imaoka; Hiroto Izumi; Akinobu Teramoto; Masafumi Kitano; Hiroshi Sugawara; Masaaki Nagase; Nobukazu Ikeda; Koji Nishino; Masayuki Miyashita; Hirohisa Kikuyama; Jun Takano; Hiroshi Morita; Ikunori Yokoi; Nobuhiko Inoue; Senri Ojima; Kenichi Mitsumori; Tadahiro Ohmi; Hitoshi Morinaga
_91187772
245 0 _aScientific Wet Process Technology for Innovative LSI/FPD Manufacturing
260 _bTaylor and Francis
260 _c2005
365 _a
365 _b465
856 _uhttp://www.taylorfrancis.com/books/9781315221076
942 _cEBOOK
999 _c1785458
_d1785458