000 00728nam a2200289Ia 4500
005 20260324132033.0
008 008 260324s9999 xx 000 0 eng d
020 _a9781315219288
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aSergey Edward Lyshevski
_91180007
245 0 _aNano- and Micro-Electromechanical Systems
245 0 _bFundamentals of Nano- and Microengineering, Second Edition
260 _bTaylor and Francis
260 _c2005
365 _a
365 _b305
856 _uhttp://www.taylorfrancis.com/books/9781315219288
942 _cEBOOK
999 _c1785484
_d1785484