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| 020 | _a9780429207655 | ||
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_aAlain C. Diebold _91198138 |
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| 245 | 0 | _aHandbook of Silicon Semiconductor Metrology | |
| 260 | _bTaylor and Francis | ||
| 260 | _c2001 | ||
| 365 | _a | ||
| 365 | _b720 | ||
| 856 | _uhttp://www.taylorfrancis.com/books/9780429207655 | ||
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