| 000 | 01001nam a2200277Ia 4500 | ||
|---|---|---|---|
| 005 | 20260324134805.0 | ||
| 008 | 008 260324s9999 xx 000 0 eng d | ||
| 020 | _a9781315220239 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aChadi El Chemali; Arnon M. Hurwitz; Argon Chen; Ruey-Shan Guo; William Moyne; Nital Patel; Taber H. Smith; Duane Boning; Jin-Jung Chen; Robert A. Soper; Jinn-Yi Yeh; Jonathan Chapple-Sokol; Naumann Chaudhry; John Colt; Rock Nadeau; Tarun Parikh; Elke Rundensteiner; Paul H. Smith; Joe White; Victor Solakhian; James Moyne; Enrique del Castillo; B. Karumullah Khan _91198168 |
||
| 245 | 0 | _aRun-to-Run Control in Semiconductor Manufacturing | |
| 260 | _bTaylor and Francis | ||
| 260 | _c2001 | ||
| 365 | _a | ||
| 365 | _b370 | ||
| 856 | _uhttp://www.taylorfrancis.com/books/9781315220239 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1798597 _d1798597 |
||