000 00644nam a2200265Ia 4500
005 20260324152852.0
008 008 260324s9999 xx 000 0 eng d
020 _a9780815515937
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aSarkar, Jaydeep
_91229970
245 0 _aSputtering Materials for VLSI and Thin Film Devices
260 _bElsevier
260 _c2013
650 _aEngineering
856 _uhttps://www.sciencedirect.com/science/book/9780815515937
942 _cEBOOK
999 _c1840929
_d1840929