000 00643nam a2200265Ia 4500
005 20260324152904.0
008 008 260324s9999 xx 000 0 eng d
020 _a9781455777532
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aLeach, Richard
_91230024
245 0 _aFundamental Principles of Engineering Nanometrology
260 _bElsevier
260 _c2014
650 _aEngineering
856 _uhttps://www.sciencedirect.com/science/book/9781455777532
942 _cEBOOK
999 _c1841010
_d1841010