000 00661nam a2200265Ia 4500
005 20260324153007.0
008 008 260324s9999 xx 000 0 eng d
020 _a9780323378284
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aLuttge, Regina
_91230303
245 0 _aNano- and Microfabrication for Industrial and Biomedical Applications
260 _bElsevier
260 _c2016
650 _aEngineering
856 _uhttps://www.sciencedirect.com/science/book/9780323378284
942 _cEBOOK
999 _c1841394
_d1841394