000 00678nam a2200265Ia 4500
005 20260324153113.0
008 008 260324s9999 xx 000 0 eng d
020 _a9780323327374
037 _aEBOOK
040 _aCRL
040 _beng
040 _cCRL
041 _2eng
041 _aeng
084 _qCRL
100 _aBhattacharyya, Bijoy
_9902181
245 0 _aElectrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology
260 _bElsevier
260 _c2015
650 _aMaterials Science
856 _uhttps://www.sciencedirect.com/science/book/9780323327374
942 _cEBOOK
999 _c1841797
_d1841797