| 000 | 00657nam a2200265Ia 4500 | ||
|---|---|---|---|
| 005 | 20260324153116.0 | ||
| 008 | 008 260324s9999 xx 000 0 eng d | ||
| 020 | _a9780323299657 | ||
| 037 | _aEBOOK | ||
| 040 | _aCRL | ||
| 040 | _beng | ||
| 040 | _cCRL | ||
| 041 | _2eng | ||
| 041 | _aeng | ||
| 084 | _qCRL | ||
| 100 |
_aLindroos, Veikko _91230607 |
||
| 245 | 0 | _aHandbook of Silicon Based MEMS Materials and Technologies | |
| 260 | _bElsevier | ||
| 260 | _c2015 | ||
| 650 | _aMaterials Science | ||
| 856 | _uhttps://www.sciencedirect.com/science/book/9780323299657 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1841812 _d1841812 |
||