| 000 | 01036nam a2200325Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912144936.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9781574446753 (hbd) | ||
| 024 | _a82203 | ||
| 037 | _b230, 21/10/2008, Ashutosh Technical Books | ||
| 037 | _cREF | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC6:212:(F)g, P8 RR | ||
| 100 | _aDoering Robert Ed. | ||
| 245 | 0 | _aHandbook of semiconductor manufacturing technology | |
| 250 | _a2 | ||
| 260 |
_aBoca Raton _bCRC Pres _c2008 |
||
| 300 |
_aVarious pagination _ccm. |
||
| 500 | _aIncludes bibliographical references.; Appendix A-D, A1-D8p.; Index I1-I26p. | ||
| 650 | _a Semiconductor industry | ||
| 650 | _a Semiconductors-design | ||
| 650 | _aPhysics | ||
| 700 | _a Nishi Yoshio Ed. | ||
| 942 |
_hC6:212:(F)g, P8 RR _cREF _2CC |
||
| 999 |
_c19521 _d19521 |
||