| 000 | 00846nam a2200265Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912145108.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 024 | _a75618 | ||
| 037 | _cTextbook | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC6:212p1,N72, L3 | ||
| 100 | _aCrowder Billy L Ed. | ||
| 111 | _aInetrnational conference on ion implantation in semiconductors and other materials (1972 : New York) | ||
| 245 | 0 | _aProceeding on Ion implantation in semiconductors and other materials | |
| 260 |
_aNew York _bPlenum Press _c1973 |
||
| 300 |
_axii, 657p. ill _ccm. |
||
| 490 | _aIBM research symposium series | ||
| 650 | _aSemiconductor | ||
| 942 |
_hC6:212p1,N72, L3 _cTB _2CC |
||
| 999 |
_c23074 _d23074 |
||