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| 005 | 20220912145320.0 | ||
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| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 024 | _a73628 | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
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| 041 | _aeng | ||
| 082 | _aD651, M2 | ||
| 100 | _aBrodie Ivor | ||
| 245 | 0 | _aPhysics of microfabrication | |
| 260 |
_aNew York _bPlenum Press _c1982 |
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| 300 |
_axx, 502p. _ccm. |
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| 650 | _aMicroelectronics | ||
| 700 | _a Muray Julius J | ||
| 942 |
_hD651, M2 _cTEXL _2CC |
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_c28760 _d28760 |
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