000 00891nam a2200301Ia 4500
003 OSt
005 20220912150126.0
006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
020 _a0471005770 (hbd)
024 _a10570
037 _bAshutosh,
037 _cTextual
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aC9B58, N4
100 _aLieberman Michael A
245 0 _aPrinciples of plasma discharges and materials processing
260 _aNew York John Wiley Sons, Inc.
_c1994
300 _axxvi, 572p
500 _aAppendix A-C, 541-558p; Index 559-572p; ^n23/CSL/C/2002-2003/323^d2002-09-10^mPurchase
650 _a Plasma
650 _aPhysics
700 _a Lichtenberg Allan J
942 _hC9B58, N4
_cTEXL
_2CC
999 _c40232
_d40232