000 01019nam a2200313Ia 4500
003 OSt
005 20220912144128.0
006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
020 _a9781118717967 (hbk)
024 _a197167
037 _b4139, 09/03/2017, Ashutosh Technical Books
037 _cTextual
040 _beng
041 _aeng
082 _aC21:(D), Q7
100 _aZahang Wendong
245 0 _aMeasurement technology: for micro-nanometer devices
260 _aSingapore
_bJohn wiley & sons
_c2016
300 _axii,329p. ill.
_ccm
500 _aIncludes bibliographical references; Index 327-329p.
700 _a Bao Haifei
700 _a Chou Xiujian
700 _a Ma Zongmin
700 _a Shi Tielin
942 _hC21:(D), Q7
_cTEXL
_2CC
999 _c4109
_d4109