000			01063nam a2200325Ia 4500
003			OSt
005			20220912150200.0
006			a|||||r|||| 00| 0
007			ta
008			220909b |||||||| |||| 00| 0 eng d
020			_a352740502X (hbd)
024			_a15586
037			_b173, 28/09/2005, Ashutosh Technical Books
037			_cTextual
040			_aCSL _beng _cCSL
041			_aeng
082			_aC21:(D), P5
100			_aWilkening Gunter Ed.
245		0	_aNanoscale calibration standards and methods: dimensional and related measurements in the micro and nanometer range
260			_aWeinheim _bWiley-Vch _c2005
300			_axxii, 519p. _ccm.
500			_aIncludes bibliographical references.; Index 515-519p. _ccm.
650			_a Nanometer range
650			_a Nanoscale
650			_a Nanoscience
650			_aNanoscience
700			_a Koenders Ludger Ed.
942			_hC21:(D), P5 _cTEXL _2CC
999			_c41402 _d41402