| 000 | 00915nam a2200301Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912150326.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a3540667725 (hbd) | ||
| 024 | _a7329 | ||
| 037 | _bShankar, | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC9B581, P0 | ||
| 100 | _aShul R J Ed | ||
| 245 | 0 | _aHandbook of advanced plasma processing techniques ed by R J Shul and S J Pearton | |
| 260 |
_aBerlin _bSpringer-Verlag _c2000 |
||
| 300 | _axvi,653p | ||
| 500 | _aIncludes bibliographical references; Index 649-653p; ^n23/CSL/C/00-01/OTSG/539^d2001-01-30^mPurchase | ||
| 650 | _a Plasma engineering | ||
| 650 | _aPhysics | ||
| 700 | _a Pearton S J Ed | ||
| 942 |
_hC9B581, P0 _cTEXL _2CC |
||
| 999 |
_c44960 _d44960 |
||