| 000 | 01021nam a2200325Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912144009.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780367147570 (PBK) | ||
| 024 | _a200452 | ||
| 037 | _b941, 12/02/2019, Satyam Books Pvt. Ltd. | ||
| 037 | _cTextual | ||
| 040 | _beng | ||
| 041 | _aeng | ||
| 082 | _aC21:(D), P5-;4 | ||
| 100 | _aLyshevski Sergey Edward | ||
| 245 | 0 | _aNano- and micro-electomechanical systems: Fundamentals of nano- and microengineering | |
| 250 | _a2 | ||
| 260 |
_aBoca Raton _bCRC press _c2005 |
||
| 300 |
_a722p. ill. _ccm |
||
| 500 | _aIndex 705-722p.; Reprint 2019. | ||
| 650 | _a Classification and consideration | ||
| 650 | _a Engineering and technology | ||
| 650 | _a Microscale systems devices and structures | ||
| 650 | _aPhysics | ||
| 942 |
_hC21:(D), P5-;4 _cTEXL _2CC |
||
| 999 |
_c457 _d457 |
||