| 000 | 00794nam a2200301Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912150427.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 024 | _a37482 | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC9B58, L3 | ||
| 100 | _aDearnaley G | ||
| 245 | 0 | _aIon implantation | |
| 260 |
_aLondon _bNorth-Holland Publishing _c1973 |
||
| 300 |
_axv, 802p. _ccm. |
||
| 490 | _aSeries defects in crystal in solids | ||
| 650 | _a Ion | ||
| 650 | _aPlasma physics | ||
| 700 | _a Freeman J H | ||
| 700 | _a Nelson R S | ||
| 700 | _a Stephen J | ||
| 942 |
_hC9B58, L3 _cTEXL _2CC |
||
| 999 |
_c47256 _d47256 |
||