| 000 | 00899nam a2200289Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912150506.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 024 | _a51740 | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC13p1,N83, M4 | ||
| 100 | _aHubler G K Ed. | ||
| 111 | _aSymposium on Ion implantation and ion beam processing of materials (1984 : Boston) | ||
| 245 | 0 | _aProceeding on Ion implantation and ion beam processing of materials | |
| 260 |
_aNew York _b North Holland _c1984 |
||
| 300 |
_axix, 786p. _ccm. |
||
| 490 | _aMaterials research society symposia proceedings; 27 | ||
| 650 | _a Matter | ||
| 650 | _aPhysics | ||
| 700 | _a Holland O W Ed. | ||
| 942 |
_hC13p1,N83, M4 _cTEXL _2CC |
||
| 999 |
_c48551 _d48551 |
||