| 000 | 00923nam a2200301Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912150634.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a0471452386 (hbd) | ||
| 024 | _a12579 | ||
| 037 | _b177, 20/09/2004, Ashutosh Technical Books | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
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| 041 | _aeng | ||
| 082 | _aC6:212, P4 | ||
| 100 | _aMay Gary S | ||
| 245 | 0 | _aFundamentals of semiconductor fabrication | |
| 260 |
_aHoboken John Wiley & Sons, Inc. _c2004 |
||
| 300 |
_axiii,305p. _ccm. |
||
| 500 |
_aIncludes bibliographical references.; Appendix A-L, 265-396p. _ccm.; Index 297-305p. _ccm. |
||
| 650 | _a Semiconductor | ||
| 650 | _aPhysics | ||
| 700 | _a Sze Simon M | ||
| 942 |
_hC6:212, P4 _cTEXL _2CC |
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| 999 |
_c51683 _d51683 |
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