| 000 | 00925nam a2200325Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912150830.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a8181282027 (pbk) | ||
| 024 | _a13160 | ||
| 037 | _b714, 22/12/2004, Unilib Book Distributors | ||
| 037 | _cTextual | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC21:(D), P3 | ||
| 100 | _aFujita H Ed. | ||
| 245 | 0 | _aMicromachines as tools for nanotechnology | |
| 260 |
_aBarlin _bSpringer-Verlag _c2003 |
||
| 300 |
_axii, 211p. _ccm. |
||
| 490 | _aMicrotechnology and mems | ||
| 500 | _aIncludes bibliographical references | ||
| 650 | _a Computer Science | ||
| 650 | _a Matter | ||
| 650 | _a Solid | ||
| 650 | _aPhysics | ||
| 942 |
_hC21:(D), P3 _cTEXL _2CC |
||
| 999 |
_c55776 _d55776 |
||