000 00672nam a2200253Ia 4500
003 OSt
005 20220912151428.0
006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
024 _a28440
037 _cTextual
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aC6:47, M7
100 _aSpposton J L Ed.
245 0 _aElectrostatic damage in the electronics industry
260 _aBristol
_bInstitute of Physics
_c1987
300 _a72p.
_ccm.
490 _aI O P short meeting series; 3
650 _aPhysics
942 _hC6:47, M7
_cTEXL
_2CC
999 _c68433
_d68433